Effect of chamber pressure on the growth of nanoparticles copper- carbon composite films prepared by simultaneity use of RF-PECVD and RF-sputtering deposition technique
Effect of chamber pressure on the growth of nanoparticles copper- carbon composite films prepared by simultaneity use of RF-PECVD and RF-sputtering deposition technique (سومين کنفرانس ملی خلا -تهران)